Porous ceramics,Ceramic chuck,Porous ceramic chuck table,Porous
Ceramic Partial Vacuum Chuck
Porous Ceramic chuck table
Adhesive surface with planarity of 5μm max.
Brief inroduction
Work pieces can be adhesively fixed by aligning the porous to the
body of the metal(or ceramic),and applying negative pressure from
the back and sides of the body.
Due to the pores that are very tiny and averagely spread,vaccum chuck would not cause harms and scratch on your work pieces,improving
the yield rate,making the best partner of manufacture.
Features
A. Reusable
B. Depletion resistance
C. No dust
D. Light weight
1. Shape Conformance to all shapes is possible
2. Size Round(Φ5mm~Φ600mm)Square(50mm*50mm~1000mm*1000mm)
Application
Semiconductors wafer dicing,grinding,washing,LEDs,printing
Precise Porous Ceramic Partial Vacuum Chuck
Best solution to the specific shape of work pieces
Features
A. Reginal adhesion
B. High heat resistance
C. Corrosion resistance
D. Depletion resistance
E. Lightweight
F. High insulation
G. No dust
Customize:specific size,shape,body material,porous size.
A. Modular design,can be installed in any institution or robot.
B. Porous base design for easy mounting.
C. Double vent design can be used for suction/blowing,floating.
D. Flatness:0.01~0.05mm
E. Customizable appearance size.
Applications
A. Ceramic Vacuum gripping module,special for gripping flat work
piece.
B. If gripping half of the area can be maintained,then the ceramic
gripper won't lose the work piece.Several work pieces can use same
ceramic gripper.
C. Best for clean environment of machine production or factory
production,assemble and automation industry.
Specification
| POROUS ALUMINA CERAMICS(Al₂O₃)Main Parameter:(Chemical/physical) | | | |
| Property | Item | Unit | ALUMINA |
| General properties | Main chemical ingredient | | Al₂O₃ 99.9% |
| Bulk Density | g/cm³ | 3.9 |
| Color | - | Ivory |
| Water absorption | % | 0 |
| Main Characteristics | | | *Good Anti-Plasma*Wear Resistance*High Purity |
|
| Main Applications | | | *Wear Resistant Parts*Chemically Resistant Parts*Semiconductor
Processing Equipment Parts |
| Mechanical Properties | Flexural Strength | Mpa | 400 |
| Elastic Modulus | Gpa | 380 |
| Vickers Hardness | Gpa | 17.5 |
| Compressive Strength 20℃ | Mpa | - |
| Fracture Toughness(k l c) | Mpa*M*1/2 | 5~6 |
| Thermal Properties | Thermal conductivity(20℃) | w/mk | 34 |
| Thermal Shock | ℃ | - |
| Coefficient of Thermal expansion (40-400℃) | 1x10-6/℃ | 7.2 |
|
|
| Coefficient of Thermal expansion (40-800℃) | 1x10-6/℃ | 8 |
| Electrical Properties | Dielectric Strength(1mhz) | kv/mm | 15 |
| Dielectric Constant(1MHZ) | 25℃ | 9.9 |
| Volume Resistivity | ohm-cm(20℃) | ＞10^14 |
| ohm-cm(300℃) | 10^13 |
| ohm-cm(500℃) | 10^10 |
Our Company
Wuxi Special Ceramic Electrical mainly produces alumina, Silicon nitride, Zirconia, Steatite, Boron nitride,
Cordierite,mullite products, widely used in metal welding, electronic conductor, mechanics,
assembling, insulation, chemicals, instrument, textile, nuclear
industry, aerial field.We accept trial produce according to the
drawing or sample.It usually takes 15 days to finish trial
product.Mass produce usually takes 30 days.Goods' package is carton
or PLT.It can be negotiable with each other.
We mainly sell goods to toshiba lighting group in Japan and
Europe.Our aim is to deliver goods with high quality at quick
delivery date.
